TY  - CONF
AU  - X. Binefa
AU  - F. Javier Sanchez
AU  - F.X. Perez
AU  - Xavier Roca
AU  - Jordi Vitria
AU  - Juan J. Villanueva
PY  - 1993//
TI  - Using defocus in optical inspection of integrated circuits
BT  - Institute of Physics Conferences Series
SP  - 389
EP  - 392
VL  - 135
IS  - 10
PB  - Institute of Physics
N1  - MV;OR;ISE
ID  - X. Binefa1993
ER  -