%0 Conference Proceedings
%T Using defocus in optical inspection of integrated circuits
%A X. Binefa
%A F. Javier Sanchez
%A F.X. Perez
%A Xavier Roca
%A Jordi Vitria
%A Juan J. Villanueva
%B Institute of Physics Conferences Series
%D 1993
%V 135
%N 10
%I Institute of Physics
%F X. Binefa1993
%O MV;OR;ISE
%O exported from refbase (http://refbase.cvc.uab.es/show.php?record=151), last updated on Mon, 14 Jan 2019 14:23:50 +0100
%P 389-392