@InProceedings{X.Binefa1993,
author="X. Binefa
and F. Javier Sanchez
and F.X. Perez
and Xavier Roca
and Jordi Vitria
and Juan J. Villanueva",
title="Using defocus in optical inspection of integrated circuits",
booktitle="Institute of Physics Conferences Series",
year="1993",
publisher="Institute of Physics",
volume="135",
number="10",
pages="389--392",
optnote="MV;OR;ISE",
optnote="exported from refbase (http://refbase.cvc.uab.es/show.php?record=151), last updated on Mon, 14 Jan 2019 14:23:50 +0100"
}