%0 Generic
%T Three dimensional inspection of integrated circuits: a depth from focus approach.
%A X. Binefa
%A Jordi Vitria
%A Juan J. Villanueva
%D 1992
%F X. Binefa1992
%O OR;MV
%O exported from refbase (http://refbase.cvc.uab.es/show.php?record=250), last updated on Fri, 03 Feb 2012 19:13:15 +0100
%9 miscellaneous