@Misc{X.Binefa1992, author="X. Binefa and Jordi Vitria and Juan J. Villanueva", title="Three dimensional inspection of integrated circuits: a depth from focus approach.", year="1992", optnote="OR;MV", optnote="exported from refbase (http://refbase.cvc.uab.es/show.php?record=250), last updated on Fri, 03 Feb 2012 19:13:15 +0100" }