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| Author | Title | Year | Publication | Volume | Pages |
|---|---|---|---|---|---|
| X. Binefa; F. Javier Sanchez; F.X. Perez; Xavier Roca; Jordi Vitria; Juan J. Villanueva | Using defocus in optical inspection of integrated circuits | 1993 | Institute of Physics Conferences Series | 135 | 389-392 |