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| Record | |||||
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Author  |
X. Binefa; F. Javier Sanchez; F.X. Perez; Xavier Roca; Jordi Vitria; Juan J. Villanueva | ||||
| Title | Using defocus in optical inspection of integrated circuits | Type | Conference Article | ||
| Year | 1993 | Publication | Institute of Physics Conferences Series | Abbreviated Journal | |
| Volume | 135 | Issue | 10 | Pages | 389-392 |
| Keywords | |||||
| Abstract | |||||
| Address | Bristol | ||||
| Corporate Author | Thesis | ||||
| Publisher | Institute of Physics | Place of Publication | Editor | ||
| Language | Summary Language | Original Title | |||
| Series Editor | Series Title | Abbreviated Series Title | |||
| Series Volume | Series Issue | Edition | |||
| ISSN | ISBN | Medium | |||
| Area | Expedition | Conference | |||
| Notes | MV;OR;ISE | Approved | no | ||
| Call Number | BCNPCL @ bcnpcl @ BSP1993; IAM @ iam @ BSP1993 | Serial | 151 | ||
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