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Author (up) X. Binefa; F. Javier Sanchez; F.X. Perez; Xavier Roca; Jordi Vitria; Juan J. Villanueva edit  openurl
  Title Using defocus in optical inspection of integrated circuits Type Conference Article
  Year 1993 Publication Institute of Physics Conferences Series Abbreviated Journal  
  Volume 135 Issue 10 Pages 389-392  
  Address Bristol  
  Corporate Author Thesis  
  Publisher Institute of Physics Place of Publication Editor  
  Language Summary Language Original Title  
  Series Editor Series Title Abbreviated Series Title  
  Series Volume Series Issue Edition  
  ISSN ISBN Medium  
  Area Expedition Conference  
  Notes MV;OR;ISE Approved no  
  Call Number BCNPCL @ bcnpcl @ BSP1993; IAM @ iam @ BSP1993 Serial 151  
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