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Author
X. Binefa; F. Javier Sanchez; F.X. Perez; Xavier Roca; Jordi Vitria; Juan J. Villanueva
Title
Using defocus in optical inspection of integrated circuits
Type
Conference Article
Year
1993
Publication
Institute of Physics Conferences Series
Abbreviated Journal
Volume
135
Issue
10
Pages
389-392
Keywords
Abstract
Address
Bristol
Corporate Author
Thesis
Publisher
Institute of Physics
Place of Publication
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Summary Language
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Series Editor
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Expedition
Conference
Notes
MV;OR;ISE
Approved
no
Call Number
BCNPCL @ bcnpcl @ BSP1993; IAM @ iam @ BSP1993
Serial
151
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