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Author | X. Binefa; F. Javier Sanchez; F.X. Perez; Xavier Roca; Jordi Vitria; Juan J. Villanueva | ||||
Title | Using defocus in optical inspection of integrated circuits | Type | Conference Article | ||
Year | 1993 | Publication | Institute of Physics Conferences Series | Abbreviated Journal | |
Volume | 135 | Issue | 10 | Pages | 389-392 |
Keywords | |||||
Abstract | |||||
Address | Bristol | ||||
Corporate Author | Thesis | ||||
Publisher | Institute of Physics | Place of Publication | Editor | ||
Language | Summary Language | Original Title | |||
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | ISBN | Medium | |||
Area | Expedition | Conference | |||
Notes | MV;OR;ISE | Approved | no | ||
Call Number | BCNPCL @ bcnpcl @ BSP1993; IAM @ iam @ BSP1993 | Serial | 151 | ||
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