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Author (up) X. Binefa; Jordi Vitria; Juan J. Villanueva edit  openurl
  Title Three dimensional inspection of integrated circuits: a depth from focus approach. Type Conference Article
  Year 1992 Publication SPIE/IS&T Symposium on Electronic Imaging (Conference on Machine Vision in Microelectronics Manufacturing) Abbreviated Journal  
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  Area Expedition Conference  
  Notes OR;MV Approved no  
  Call Number BCNPCL @ bcnpcl @ BVV1992a Serial 250  
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