Home | << 1 >> |
Record | |||||
---|---|---|---|---|---|
Author | X. Binefa; Jordi Vitria; Juan J. Villanueva | ||||
Title | Three dimensional inspection of integrated circuits: a depth from focus approach. | Type | Conference Article | ||
Year | 1992 | Publication | SPIE/IS&T Symposium on Electronic Imaging (Conference on Machine Vision in Microelectronics Manufacturing) | Abbreviated Journal | |
Volume | Issue | Pages | |||
Keywords | |||||
Abstract | |||||
Address | |||||
Corporate Author | Thesis | ||||
Publisher | Place of Publication | Editor | |||
Language | Summary Language | Original Title | |||
Series Editor | Series Title | Abbreviated Series Title | |||
Series Volume | Series Issue | Edition | |||
ISSN | ISBN | Medium | |||
Area | Expedition | Conference | |||
Notes | OR;MV | Approved | no | ||
Call Number | BCNPCL @ bcnpcl @ BVV1992a | Serial | 250 | ||
Permanent link to this record |